drie
美
英 
- 網(wǎng)絡(luò)深反應(yīng)離子刻蝕(deep reactive ion etching);反應(yīng)離子刻蝕技術(shù);深反應(yīng)離子刻蝕技術(shù)
例句
Fabrication of Ultra Deep Electrical Isolation Trenches with High Aspect Ratio Using DRIE and Dielectric Refill
用深反應(yīng)離子刻蝕和介質(zhì)填充技術(shù)制造具有高深寬比的超深電隔離槽
Trench Profile Control of Silicon DRIE Process on ICP Tools
ICP體硅深刻蝕中側(cè)壁形貌控制的研究